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№1 слайд![ОСНОВИ НАП ВПРОВ ДНИКОВО](/documents_6/7f1d18a4b386ddcc162678eb20b071d6/img0.jpg)
Содержание слайда: ОСНОВИ НАПІВПРОВІДНИКОВОЇ ЕЛЕКТРОНІКИ
Лекція 10
Енергонезалежні елементи памяті
Анатолій Євтух
Інститут високих технологій
Київського національного університету імені Тараса Шевченка
№2 слайд![](/documents_6/7f1d18a4b386ddcc162678eb20b071d6/img1.jpg)
№3 слайд![Прилади з плаваючим затвором](/documents_6/7f1d18a4b386ddcc162678eb20b071d6/img2.jpg)
Содержание слайда: Прилади з плаваючим затвором
№4 слайд![](/documents_6/7f1d18a4b386ddcc162678eb20b071d6/img3.jpg)
№5 слайд![](/documents_6/7f1d18a4b386ddcc162678eb20b071d6/img4.jpg)
№6 слайд![](/documents_6/7f1d18a4b386ddcc162678eb20b071d6/img5.jpg)
№7 слайд![](/documents_6/7f1d18a4b386ddcc162678eb20b071d6/img6.jpg)
№8 слайд![](/documents_6/7f1d18a4b386ddcc162678eb20b071d6/img7.jpg)
№9 слайд![](/documents_6/7f1d18a4b386ddcc162678eb20b071d6/img8.jpg)
№10 слайд![МДОН структури](/documents_6/7f1d18a4b386ddcc162678eb20b071d6/img9.jpg)
Содержание слайда: МДОН структури
№11 слайд![](/documents_6/7f1d18a4b386ddcc162678eb20b071d6/img10.jpg)
№12 слайд![Evolution- Floating-gate No](/documents_6/7f1d18a4b386ddcc162678eb20b071d6/img11.jpg)
Содержание слайда: Evolution-1
Floating-gate
No principal changes
№13 слайд![. . Advantages and](/documents_6/7f1d18a4b386ddcc162678eb20b071d6/img12.jpg)
Содержание слайда: 1.2. Advantages and Disadvantages
Floating-gate
Advantages
1. Developed technology
(CMOS compatibility)
2. Long data retention
Disadvantages
1. Limitation of scale down
2. Low reliability
3. Low radiation hardness
№14 слайд![Evolution- Floating-gate](/documents_6/7f1d18a4b386ddcc162678eb20b071d6/img13.jpg)
Содержание слайда: Evolution- 2
Floating-gate –
Nanocrystal memory
Nanocrystal memory
№15 слайд![. . Nanocrystal memory Main](/documents_6/7f1d18a4b386ddcc162678eb20b071d6/img14.jpg)
Содержание слайда: 1.3. Nanocrystal memory
Main idea:
The continuous poly-Si Floating gate is replaced on discontinuous Si nanocrystals (discontinuous floating gate)
№16 слайд![Nanocrystal memory Energy](/documents_6/7f1d18a4b386ddcc162678eb20b071d6/img15.jpg)
Содержание слайда: Nanocrystal memory
Energy band diagram during injection (a), store (b), and removal (c) of an electron from a nanocrystal.
№17 слайд![. . . Why nanocrystal memory?](/documents_6/7f1d18a4b386ddcc162678eb20b071d6/img16.jpg)
Содержание слайда: 1.3.1. Why nanocrystal memory?
1. CMOS compatibility
2. High integrity (scaling down)
3. Faster (high speed of write/erase)
4. High injection efficiency
5. Consumption of lower power
6. Low voltage operation
7. High stability
8. High reliability
9. Much smaller degradation
10. Potential application for multilevel memory and logic
11. Novel Si functional devices
№18 слайд![High integrity scaling down](/documents_6/7f1d18a4b386ddcc162678eb20b071d6/img17.jpg)
Содержание слайда: High integrity (scaling down)
Floating-gate
1. Poly-Si cannot be used with very thin tunnel oxide-scaling problem
2. Single leakage path in poly-Si can be discharge the memory with loss the information
3. Stress induced leakage current (SILC)
№19 слайд![High stability High](/documents_6/7f1d18a4b386ddcc162678eb20b071d6/img18.jpg)
Содержание слайда: High stability / High reliability
№20 слайд![Low voltage operation](/documents_6/7f1d18a4b386ddcc162678eb20b071d6/img19.jpg)
Содержание слайда: Low voltage operation / Consumption of lower power / Faster / Much smaller degradation / High injection efficiency
Hot carrier injection / Fowler-Nordheim tunneling
Direct tunneling (do<4.5 nm)
№21 слайд![Fowler-Nordheim Direct](/documents_6/7f1d18a4b386ddcc162678eb20b071d6/img20.jpg)
Содержание слайда: Fowler-Nordheim – Direct tinneling(1)
Hot carrier injection (1) / Fowler-Nordheim tunneling (2)
Direct tunneling (do<4.5 nm) (3)
№22 слайд![Fowler-Nordheim Direct](/documents_6/7f1d18a4b386ddcc162678eb20b071d6/img21.jpg)
Содержание слайда: Fowler-Nordheim – Direct tinneling(2)
Fowler-Nordheim tunneling
Direct tunneling
№23 слайд![Potential application for](/documents_6/7f1d18a4b386ddcc162678eb20b071d6/img22.jpg)
Содержание слайда: Potential application for multilevel memory and logic
№24 слайд![Novel Si functional devices .](/documents_6/7f1d18a4b386ddcc162678eb20b071d6/img23.jpg)
Содержание слайда: Novel Si functional devices
1. Nanocrystal memory- quantum dot floating gate memory
2. Single electron transistors
3. Resonant tunneling devices
№25 слайд![Comparison of non-volatile](/documents_6/7f1d18a4b386ddcc162678eb20b071d6/img24.jpg)
Содержание слайда: Comparison of non-volatile memories
EEPROM
FN – Tunneling
e- in floating gate
dox8…10 nm
Vw/e12…20 V
Endurance 104…106
Retention: 10 years
№26 слайд![Requirements for NC s used](/documents_6/7f1d18a4b386ddcc162678eb20b071d6/img25.jpg)
Содержание слайда: Requirements for NC’s used for NC Memory
1. Near-Interface NC-Band
2. NC-Size: 3...8 nm 5 nm
(NCs separated to each others)
3. Distance to Substrate: 3 – 5 nm
(NCs separated to the substrate)
4. Areal density (5-10)x1011 cm-2
Size homogeneity of Si nanoclusters is very important
Self assembly is promising process to achieve Si nanoparticle size uniformity and high areal density
№27 слайд![Requirements for NC s used](/documents_6/7f1d18a4b386ddcc162678eb20b071d6/img26.jpg)
Содержание слайда: Requirements for NC’s used for NC Memory
Improved device performance and reliability depends upon:
1. Ability to control cluster core size
2. Cluster size distribution
3. Crystallinity
4. Areal particle density
5. Oxide passivation quality
6. Crystal-to-crystal insulation
№28 слайд![. . . New physics Quantum](/documents_6/7f1d18a4b386ddcc162678eb20b071d6/img27.jpg)
Содержание слайда: 1.3.2. New physics
Quantum confinement effect
3- dimensional system (3D)
2- dimensional system (2D)
1- dimensional system (1D)
0- dimensional system (0D)
№29 слайд![Quantum confinement effect](/documents_6/7f1d18a4b386ddcc162678eb20b071d6/img28.jpg)
Содержание слайда: Quantum confinement effect
№30 слайд![Quantum confinement effect](/documents_6/7f1d18a4b386ddcc162678eb20b071d6/img29.jpg)
Содержание слайда: Quantum confinement effect
Energy spectrum
№31 слайд![Quantum confinement effect In](/documents_6/7f1d18a4b386ddcc162678eb20b071d6/img30.jpg)
Содержание слайда: Quantum confinement effect
In case of spherical nanoparticles (nanocrystals)
№32 слайд![Coulomb blockade effect The](/documents_6/7f1d18a4b386ddcc162678eb20b071d6/img31.jpg)
Содержание слайда: Coulomb blockade effect
The effect of blocking the injection of a second charge into a semiconductor under a certain electric field, due to modification of the electrostatic potential within it by the present of a first injected charge. Injection of a second charge needs to overcome the semiconductor charging energy.
№33 слайд![Coulomb blockade effect . I.](/documents_6/7f1d18a4b386ddcc162678eb20b071d6/img32.jpg)
Содержание слайда: Coulomb blockade effect
[2]. I. Kim et al. Jpn. J. Appl. Phys..40, 447-451, 2001.
№34 слайд![Coulomb blockade effect](/documents_6/7f1d18a4b386ddcc162678eb20b071d6/img33.jpg)
Содержание слайда: Coulomb blockade effect
Conclusions 2.
1. The electrons already transferred to the nanocrystals block the transfer of other electrons.
2. Single electron effects are expected to be observed at room temperature for nanocrystals with diameter up to >10 nm (Ee+E12>kT).
№35 слайд![Single electron transistor](/documents_6/7f1d18a4b386ddcc162678eb20b071d6/img34.jpg)
Содержание слайда: Single electron transistor
Quantum confinement effect
+
Coulomb blockade effect
___________________________
Single electron charging effects
___________________________
Single electron transistor
№36 слайд![Single electron transistor](/documents_6/7f1d18a4b386ddcc162678eb20b071d6/img35.jpg)
Содержание слайда: Single electron transistor
Fabrication route of forming high-density of small and uniform in size nanocrystals is an important issue to be resolved before the practical application of single electron phenomena
№37 слайд![. . . Parameters Vw e V](/documents_6/7f1d18a4b386ddcc162678eb20b071d6/img36.jpg)
Содержание слайда: 1.3.5. Parameters
Vw/e2…4 V
Endurance >106…1010
Retention: >10 years
№38 слайд![. . Conclusions . Nanocrystal](/documents_6/7f1d18a4b386ddcc162678eb20b071d6/img37.jpg)
Содержание слайда: 1.4. Conclusions
1. Nanocrystal floating gate memory is a perspective candidate for the future scaled flash memory
2. Nanocrystal memory is intermediate between present floating gate nonvolatile memory and single electron memory
№39 слайд![Дякую за увагу!](/documents_6/7f1d18a4b386ddcc162678eb20b071d6/img38.jpg)
Содержание слайда: Дякую за увагу!